JPS6223085Y2 - - Google Patents

Info

Publication number
JPS6223085Y2
JPS6223085Y2 JP1981140314U JP14031481U JPS6223085Y2 JP S6223085 Y2 JPS6223085 Y2 JP S6223085Y2 JP 1981140314 U JP1981140314 U JP 1981140314U JP 14031481 U JP14031481 U JP 14031481U JP S6223085 Y2 JPS6223085 Y2 JP S6223085Y2
Authority
JP
Japan
Prior art keywords
boat
core tube
lid
opening
lid body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981140314U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5844835U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14031481U priority Critical patent/JPS5844835U/ja
Publication of JPS5844835U publication Critical patent/JPS5844835U/ja
Application granted granted Critical
Publication of JPS6223085Y2 publication Critical patent/JPS6223085Y2/ja
Granted legal-status Critical Current

Links

JP14031481U 1981-09-21 1981-09-21 半導体製造装置 Granted JPS5844835U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14031481U JPS5844835U (ja) 1981-09-21 1981-09-21 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14031481U JPS5844835U (ja) 1981-09-21 1981-09-21 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5844835U JPS5844835U (ja) 1983-03-25
JPS6223085Y2 true JPS6223085Y2 (en]) 1987-06-12

Family

ID=29933476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14031481U Granted JPS5844835U (ja) 1981-09-21 1981-09-21 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5844835U (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06105692B2 (ja) * 1988-06-24 1994-12-21 ソニー株式会社 熱処理装置
JPH0793279B2 (ja) * 1989-09-29 1995-10-09 株式会社東芝 炉芯管開閉装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750846U (en]) * 1980-09-09 1982-03-24

Also Published As

Publication number Publication date
JPS5844835U (ja) 1983-03-25

Similar Documents

Publication Publication Date Title
JPH06295915A (ja) 半導体装置の製造装置及び半導体装置の製造方法
JPS6223085Y2 (en])
JPH05243365A (ja) 基板熱処理装置
JP2601083Y2 (ja) 縦型熱処理装置
JP3138291B2 (ja) 半導体ウエハの熱処理方法
JPS5918673Y2 (ja) 半導体装置用熱処理炉
JPS612330A (ja) 処理装置
JPS5856341A (ja) 熱処理方法および熱処理装置
JPH01321638A (ja) 熱処理管
JPH06216056A (ja) 縦型炉
JPH0468520A (ja) 熱処理炉
JPH04134816A (ja) 半導体製造装置
JPH08181082A (ja) 縦型高速熱処理装置
JPH0634241U (ja) 表面処理装置
JPH0631718Y2 (ja) ボ−ト搬送装置
JPH11135446A (ja) 半導体基板に対する表面処理用炉心管装置
JPH03175624A (ja) 半導体製造装置
JPS6031260Y2 (ja) 半導体製造装置
JPS621359B2 (en])
JPH0547686A (ja) 縦型半導体熱処理装置
JP2573429Y2 (ja) 半導体熱処理装置
JPH04264717A (ja) 半導体加熱処理装置
JPH06349749A (ja) 半導体製造装置
JPS61190929A (ja) 処理装置
JPS60262924A (ja) 回転炉床式コイル加熱炉